Cantilever bending based on humidity-actuated mesoporous silica/silicon bilayers

• Christian Ganser,
• Gerhard Fritz-Popovski,
• Roland Morak,
• Parvin Sharifi,
• Benedetta Marmiroli,
• Barbara Sartori,
• Heinz Amenitsch,
• Thomas Griesser,
• Christian Teichert and
• Oskar Paris

Beilstein J. Nanotechnol. 2016, 7, 637–644, doi:10.3762/bjnano.7.56

• humidity. We also investigate a similar film on bulk silicon substrate using grazing-incidence small-angle X-ray scattering (GISAXS), in order to determine nanostructural parameters of the film as well as the water-sorption-induced deformation of the ordered mesopore lattice. The strain of the mesoporous

• bending; grazing incidence small-angle X-ray scattering (GISAXS); mesoporous film; sorption-induced deformation; Introduction Because the bending of a microcantilever can be measured with extremely high accuracy, sensors utilizing this principle are in focus of recent research. Such sensors are able, for

• most likely induced by the sorption-induced deformation of the mesoporous film. Therefore, we attribute the strong change in the slope of the curves seen in Figure 2 (about 70% RH for adsorption and about 55% RH for desorption) to the transition from film formation on the pore walls to the spontaneous